Participant: CNR-IMM (sezione Catania), Italy
The Istituto per la Microelettronica e Microsistemi (IMM) is one of the Institutes of the Consiglio Nazionale delle Ricerche (CNR), the largest public research institution in Italy. The IMM permanent staff includes about 80 scientists and 70 collaborators (technical and administrative personnel). IMM includes sections located in Bologna, Rome, Lecce, Catania, and Naples. The sections located in Catania and Roma will be the active participants of IMM to the project, in particular with the section of Catania assuming the role of coordinator.
The activity of CNR-IMM in Catania is mainly devoted to research and development of silicon based technologies, in particular relatively to new materials and devices for microelectronic and photonic applications, development of novel techniques for solid state device characterisation, multi-scale multi-approach process simulation. IMM-Catania is well equipped with computer facilities; among them a cluster of parallel CPU’s for computationally intensive calculations, and analytical laboratories (TEM, SEM, AFM, SRP, Electrical Measurements, Electro- and Photoluminescence, Ion Beam Analysis). IMM-Catania is located in an area experiencing a strong technological expansion, due to the presence of STMicroelectronics.
IMM in Catania has a large experience of participation and coordination of European projects. In particular, the Institute has been the coordinator of the IST project SCOOP, dedicated to Si-based optoelectronics and FLASH, dedicated to the laser annealing process; IMM currently coordinates the projects FINFLASH, on memory device by FIN-FET architectures, and NUOTO, on high-k dielectrics; it also was principal contractor of the IST projects EQUIS, IMPULSE, FRENDTECH, and ADAMANT. IMM in Catania has been also involved in two TMR projects (ENDEASD and HERCULAS).