09 September 2011 16:45 Age: 6 yrs
IMPROVE partners honored by international awards
IMPROVE consortium is honored to inform you about the last international scientific recognitions obtained by 3 of its partners, UNI PAVIA - INFINEON AUSTRIA -UNI PADOVA, in the fields of Virtual Metrology and Predictive Maintenance:
1) Intel European Research and Innovation Conference (ERIC) 2010
Best Student Presentation Award
"Machine learning models for reliable Virtual Metrology with validation on CVD fab data"
Andrea Schirru (UniPV), Cristina De Luca (IFAT), Simone Pampuri (UniPV), Johannes Kaspar (IFAT) and Giuseppe De Nicolao (UniPV)"
2) International Conference on Informatics in Control, Automation and Robotics (ICINCO) 2011
Best Student Paper Award
"NONPARAMETRIC VIRTUAL SENSORS FOR SEMICONDUCTOR MANUFACTURING - Using Information Theoretic Learning and Kernel Machines"
Andrea Schirru (UniPV), Simone Pampuri (UniPV), Cristina De Luca (IFAT) and Giuseppe De Nicolao (UniPV)"
3) IEEE Conference on Automation Science and Engineering (CASE) 2011
IEEE CASE Best Student Conference Paper Award
"A Predictive Maintenance System for Silicon Epitaxial Deposition"
Gian Antonio Susto (UniPD), Alessandro Beghi (UniPD),, Cristina De Luca (IFAT),
In this conference UNI PAVIA and UNI PADOVA co-organized a special session on "Advanced Process Control for Semiconductor Manufacturing.
We are also happy to observe that among the 5 selected papers for the final stage, another IMPROVE-originated paper was selected:
"Multilevel Lasso Applied to Virtual Metrology in Semiconductor Manufacturing"
by Simone Pampuri (UniPV), Andrea Schirru (UniPV),
Giuseppe Fazio (Micron) and Giuseppe De Nicolao(UniPV).