Structure de mise en forme 2 colonnes

Implementing Manufacturing science solutions to increase equiPment pROductiVity and fab pErformance


Maintaining cost decrease per function, reducing cycle times, improving reproducibility and equipment effectiveness while reducing the environmental impact of the factories are key challenges to be addressed to keep the competitiveness of European SC manufacturers. Manufacturing Science is the main enabler that allows overcoming these challenges.

During 3,5 years, the EU funded project IMPROVE aimed to enhance European semiconductor fabs efficiency by providing methods and tools to better control the process variability, reduce the cycle time and enhance the effectiveness of the production equipment.


IMPROVE focused on 3 major development axes.

  • The development of Virtual Metrology (VM) techniques allowing the control of the process at wafer level whilst suppressing standard metrology steps.

  • The development of Predictive Maintenance (PM) techniques to improve the process tools reliability whilst optimizing the maintenance frequency and increasing the equipment uptime.

  • The development of Adaptive Control Plan (ACP) concepts, suppressing unnecessary measurements steps whilst dynamically improving the control plan efficiency.

For these 3 topics, models were developed and assessed for different process steps and equipment platforms in different manufacturing lines leading to the development of generic solutions.

The impact of the integration of the developed techniques in the various line decision systems and IT infrastructure was also evaluated and assessed.

To that end, a strong consortium of industrialists, SMEs, academia and institutes was made-up, including the major European actors in the area of semiconductor manufacturing.


The Final Summary of the project is available below.

News and events

Breaking News:

01 October 2012 12:00

IMPROVE is now closed

The IMPROVE project ends after a successful final review.

30 July 2012 14:45

Best Project Award of Industrial Technologies 2012

The IMPROVE project is finalist of the Best Project Award of Industrial Technologies 2012...