WP4 business goal is Yield improvement through incremental set-up of a fab wide comprehensive control plan and Cycle time and learning cycle reduction through optimal use of various “measurement” resources. Hence, tools and techniques used in WP4 aim at improving process reproducibility and reducing cycle time in a context of high mix medium to high volume production. The set-up of various control plans used at technology, toolset or measurement level will be assessed versus an automated evaluation of risk.
Work has been divided into 3 different subtasks:
- WP4.1 focuses on the modelling of risk (+ how to manage it in various system)
- WP4.2 balances the risks and the costs of control ( + definition of target control plan)
- WP4.3 deals with adjustments to be done day to day (i.e. dynamic sampling).
Technically speaking, advanced techniques exist by the academics or even as “demonstrators” by small software providers. Unfortunately, these techniques and algorithms are still not available as industrial solutions for the semiconductor industry. The technical goal of WP4 is then to bring together academics, industrials, start-ups and standard software providers to test on “real life examples” these techniques, to validate and assess them in terms of return on investment and eventually to define both functional and architectural guidelines for their integration into a secured and streamlined global process control framework.
This assessment will allow to develop and test actual methods for the (periodical) streamlining of various control plans and to drive their dynamic execution (real time). If some of the interfaces cannot be implemented in the timeframe of the project, they will be simulated.
Industrials will work with academics and SME on the modelling of ‘case studies” and development of ad-hoc prototypes. Software integrators will work with them on the data/information flows and architecture to be put in place